Magnetoresistive sensor

ABSTRACT

A magnetoresistive sensor includes first and second magnetic leads and a constricted junction joining the first and second magnetic leads. The first and second magnetic leads are formed of a magnetic and electrically conductive material. The constricted junction includes a junction core formed of magnetic and electrically conductive material. In one embodiment, the constricted junction also includes an ion implanted outer shell portion that at least partially surrounds the junction core and has reduced magnetic and electrical conductivity relative to the junction core. In another embodiment, the junction core has a length that is defined by a distance separating the first and second magnetic leads, and a width that is perpendicular to the length and is substantially less than an average unrestricted magnetic domain wall width corresponding to the magnetic material of the junction core.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is a continuation of and claims priority of U.S.patent application Ser. No. 10/629,028, filed Jul. 29, 2003 and entitled“A METHOD OF MANUFACTURING A MAGNETORESISTIVE SENSOR”, the content ofwhich is hereby incorporated by reference in its entirety.

FIELD OF THE INVENTION

The present invention relates to magnetoresistive sensors and, moreparticularly, but not by limitation to constricted junctions ofmagnetoresistive sensors that can be used to form ballisticmagnetoresistive sensors.

BACKGROUND OF THE INVENTION

A magnetoresistive (MR) sensor exhibits a change in electricalresistance as a function of an external magnetic field. This propertyallows MR sensors to be used as magnetic field sensors and read heads inmagnetic storage systems including disc drives andrandom-access-memories.

In disc drive storage systems, the read head is typically merged with awriter head. The writer writes encoded information to a magnetic storagemedium, which is usually a disc coated with hard magnetic films. In aread mode, a magnetic domain representing a bit of data on the discmodulates the resistance of the MR sensor as the magnetic domain passesbelow the read head. The change in resistance can be detected by passinga sensing current through the MR sensor and measuring the voltage acrossthe MR sensor. The resultant signal can be used to recover the recordeddata from the disc.

MR sensors utilize various MR effects, such as giant magnetoresistance(GMR) and tunneling magnetoresistance (TMR). The structure of the MRsensor varies depending upon the MR effect being utilized. GMR sensorsin the form of “spin valves” are generally favored by the disc driveindustry. Spin valves generally consist of a free ferromagnetic layerhaving a magnetization that rotates in response to an applied magneticfield, a conductive spacer, and a pinned ferromagnetic layer whosemagnetization has a fixed orientation. The electrical resistance of thespin valve is a function of the angle between the magnetizations of thefree ferromagnetic layer and the pinned ferromagnetic layer. The spinvalve is most resistive when the two layers are magnetized inanti-parallel directions, and is the most conductive when they areparallel.

A TMR sensor utilizes a TMR junction that is very similar to a spinvalve in the sense that it also consists of a ferromagnetic free layer,a spacer, and a pinned ferromagnetic layer. The magnetoresistance effectrises from the angular difference between the magnetizations of the twomagnetic layers in a way that is analogous to the spin valve. A majordifference between the TMR junction and the spin valve is that thespacer in the TMR junction is made of an insulator, typicallyaluminum-oxide, instead of a conductor. Moreover, in conventional TMRsensors, the electrical current is perpendicular to the plane of thefilms as opposed to in the plane of the films for GMR sensors.

There is a never-ending demand for higher data storage capacity in discdrives. One measure of the data storage capacity of a disc drive is theareal density of the bits at which the disc drive is capable of readingand writing. The areal density is generally defined as the number ofbits per unit length along a track (linear density in units of bits perinch) multiplied by the number of tracks available per unit length inthe radial direction of the disc (track density in units of track perinch or TPI).

A goal of present magnetic recording research is to achieve terabit(10¹²)-per-square-inch areal density. Such a high areal density requiresa significant decrease in the size of the magnetic domains that definethe bits of data, which also reduces the magnitude of the magnetic fieldthey generate. Accordingly, the read sensor that is used to detect themagnetic field must be highly sensitive (i.e., exhibit a largemagnetically induced change in resistance in response to an appliedmagnetic field) in order to properly detect the magnetic domains.Unfortunately, the sensitivities of GMR sensors (approximately 25%maximum resistance change) and TMR sensors (approximately 40% maximumresistance change) are believed to be insufficient for use in readingdata that has been recorded at a terabit areal density.

One promising MR effect that could be used to form a read sensor havinga sufficient sensitivity to enable reading of terabit areal densitymagnetic recordings is the ballistic magnetoresistance (BMR) effect.Such BMR sensors have exhibited sensitivities that are on the order of a3,000% magnetically induced change in resistance in response to anapplied magnetic field. The BMR effect occurs in the conduction ofspin-polarized electrons between magnetic leads through a highlyconstricted magnetic junction having a width of approximately 10nanometers (nm). The width of the constricted junction restricts themagnetic domain wall of the constricted junction to less than thespin-flip mean free path of the electrons. When a magnetic domain wallresides in the constricted junction, the electrical resistance is muchlarger than it is after an external magnetic field is applied tosubstantially sweep out the domain wall. The resulting magnetoresistiveeffect is much larger than the GMR or TMR effects.

The primary obstacle that must be overcome to form such a sensor is theformation of the constricted junction. One method involves stretching amagnetic metal rod until the desired constricted junction forms withoutbreaking the rod. Another method involves electro-deposition of magneticmaterial between adjacent tips of magnetic leads until the tips arejoined by the deposited material. Unfortunately, such methods aredifficult to perform, produce inconsistent results, can degrade rapidly(electro-deposition method), and are generally unacceptable for massproduction.

Accordingly, a need exists for MR sensors having constricted junctionsthat can be formed small enough to produce a BMR effect while allowingfor their mass production.

SUMMARY OF THE INVENTION

Embodiments of the present invention are directed to magnetoresistive(MR) sensors and constricted junctions of MR sensors. One embodiment ofthe magnetoresistive sensor includes first and second magnetic leads anda constricted junction joining the first and second magnetic leads. Thefirst and second magnetic leads are formed of a magnetic andelectrically conductive material. The constricted junction includes ajunction core formed of magnetic and electrically conductive material.In one embodiment, the constricted junction also includes an ionimplanted outer shell portion that at least partially surrounds thejunction core and has reduced magnetic and electrical conductivityrelative to the junction core.

Another embodiment of the junction core has a length that is defined bya distance separating the first and second magnetic leads, and a widththat is perpendicular to the length and is substantially less than anaverage unrestricted magnetic domain wall width corresponding to themagnetic material of the junction core.

These features and benefits will become apparent with a careful reviewof the drawings and the corresponding detailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top view of a data storage system with which embodiments ofthe present invention may be used.

FIG. 2 is a schematic diagram of a BMR sensor in accordance withembodiments of the invention and a means for sensing the BMR effect ofthe sensor in response to an external magnetic field.

FIG. 3 is a flowchart illustrating a method of forming a BMR sensor inaccordance with an embodiment of the invention.

FIGS. 4-7 are schematic diagrams of various stages of manufacture of aBMR sensor in accordance with embodiments of the invention.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

FIG. 1 is a top view of a disc drive 100, with which embodiments of thepresent invention may be used. Disc drive 100 includes a magnetic disc102 mounted for rotational movement about an axis 104 and driven byspindle motor (not shown). The components of disc drive 100 arecontained within a housing that includes base 106 and a cover (notshown). Disc drive 100 also includes an actuator 108 mounted to a baseplate 110 and pivotally moveable to disc 104 about axis 112. Actuatormechanism 108, includes actuator arm 114 and suspension assembly 116.Slider 118 is coupled to suspension assembly 116 through a gimbaledattachment which allows slider 118 to pitch and roll as it rides on anair bearing above surface 120 of disc 102. Actuator mechanism 108 isadapted to rotate slider 118 on arcuate path 122 between an innerdiameter 124 and an outer diameter 126 of disc 102. A cover 128 cancover a portion of actuator mechanism 108. Slider 118 supports a head130 having a magnetoresistive read sensor and a write transducingelement for reading information from and writing information to disc102.

During operation, as disc 102 rotates, air (and/or a lubricant) isdragged under air bearing surfaces (ABS) of slider 118 in a directionapproximately parallel to the tangential velocity of disc 102. As theair passes beneath the bearing surfaces, air compression along the airflow path causes the air pressure between disc surface 120 and thebearing surfaces to increase, which creates a hydrodynamic lifting forcethat counteracts a load force provided by suspension 116 and causesslider 118 to “fly” above and in close proximity to disc surface 120.This allows slider 118 to support head 130 in close proximity to thedisc surface 120.

Drive controller 132 controls actuator mechanism 108 through a suitableconnection. Drive controller 132 can be mounted within disc drive 100 orlocated outside of disc drive 100. During operation, drive controller132 receives position information indicating a portion of disc 102 to beaccessed. Drive controller 132 receives the position information from anoperator, from a host computer, or from another suitable controller.Based on the position information, drive controller 132 provides aposition signal to actuator mechanism 108. The position signal causesactuator mechanism 108 to pivot about axis 112. This, in turn, causesslider 118 and the head 130 it is supporting to move radially over discsurface 120 along path 122. Once head 130 is appropriately positioned,drive controller 132 then executes a desired read or write operation.

FIG. 2 is a schematic top view of a magnetoresistance sensor 150 inaccordance with embodiments of the invention. FIG. 2 also illustrates amanner of using sensor 150 in, for example, a disc drive storage system,such as that depicted in FIG. 1. Sensor 150 can also be used in amagnetic field sensor or probe, and in other devices. Sensor 150includes first and second magnetic leads 152 and 154 that are displacedfrom each other and are each formed of a magnetic and electricallyconductive material. First magnetic lead 152 includes a magnetization ormagnetic moment 156 and second magnetic lead 154 includes amagnetization or magnetic moment 158. One of the magnetizations, such asmagnetization 156 of first magnetic lead 152, is preferably fixed orpinned in place by, for example, an adjacent anti-ferromagnetic layer orlayers (not shown) through exchange coupling therewith. The othermagnetization, such as magnetization 158 of second magnetic lead 154, isa free magnetization that is free to rotate in response to an externalmagnetic field. Free magnetization 158 is preferably biased in apreferred direction relative to pinned magnetization 156 using permanentmagnets (not shown) or other methods. In accordance with one embodiment,magnetizations 156 and 158 are oriented substantially perpendicular toeach other when in a quiescent state, as shown in FIG. 2.

Sensor 150 also includes a constricted junction 160 that joins first andsecond magnetic leads 152 and 154. Constricted junction 160 is initiallyformed as a non-constricted junction that includes a magnetic andelectrically conductive layer 162 having a width 164 of approximately30-60 nanometers (nm). The non-constricted junction is formed into theconstricted junction 160 through implantation of ions therein, whichtransforms a shell portion 166 of the magnetic and electricallyconductive material into a material having reduced magnetic andelectrical conductivity. Ion implanted shell portion 166 at leastpartially surrounds a junction core 168 (indicated by dashed lines) thatis formed of a remaining portion of the magnetic and electricallyconductive layer 162.

Preferably, shell portion 166 adjoins one or both sides 170 and 172 toreduce the initial width 164 of the magnetic and electrically conductivelayer 162 to a width 174 corresponding to junction core 168. Widths 164and 174 are perpendicular to a length of the junction which correspondsto the distance spanned by the junction between the first and secondmagnetic leads 152 and 154. In accordance with one embodiment of theinvention, width 174 of junction core 168 is reduced by shell portion166 to approximately 20 nm or less. Furthermore, the volume of junctioncore 168 is preferably much less than the volumes of either the first orsecond magnetic leads 152 or 154 which are not drawn to scale in FIG. 2.Additionally, shell portion 166 can impinge upon a top and/or bottom ofthe initial magnetic and electrically conductive layer 162 to reduce thethickness of junction core 168.

Application of an external magnetic field to sensor 150 causes freemagnetization 158 to rotate thereby changing its orientation relative topinned magnetization 156. Such relative orientation changes cause achange in resistance across sensor 150. In general, the resistivity ofsensor 150 increases as the magnetizations 156 and 158 become moreanti-parallel, and the resistivity decreases as the magnetizations 156and 158 become more parallel. The small width 174 of junction core 168increases the sensitivity of sensor 150 to external magnetic fields ascompared to typical magnetoresistance sensors, such as giantmagnetoresistance sensors. Preferably, width 174 of junction core 168 isconstricted to substantially less than an average unrestricted domainwall width of the magnetic material that forms junction core 168, whichis generally approximately 20 nm or less. Such a constriction tojunction core 168 allows sensor 150 to produce a ballisticmagnetoresistance (BMR) effect, which further increases the sensitivityof sensor 150 to external magnetic fields. In general, the resistivityof sensor 150 will increase due to an increase in the resistivity ofconstricted junction core 168 as a result of the presence of aconstricted domain wall therein, which develops when magnetizations 156and 158 are anti-parallel. As magnetizations 156 and 158 become moreparallel, the resistivity through junction core 168 decreases.

In operation, a sensing current 1 is generated by a current source 176,which is directed through a conductive path formed by first magneticlead 152, junction core 168 of constricted junction 160, and secondmagnetic lead 154. Resistance changes across sensor 150 in response toan external magnetic field are sensed by measuring a voltage drop acrosssensor 150 using a sensing means 178 in accordance with known methods.When used in a disc drive storage system, such as that depicted in FIG.1, read circuitry (not shown) can decipher the sensed resistance changesto determine the data stored on the recording medium.

FIG. 3 is a flowchart illustrating a method of forming sensor 150 inaccordance with embodiments of the invention. The method will bedescribed with reference to FIGS. 4-7 which are schematic diagrams ofvarious stages of the formation of sensor 150. At steps 180 and 182 ofthe method, first and second magnetic leads 152 and 154 are respectivelyformed. As explained above, first and second magnetic leads 152 and 154are formed of a magnetic and electrically conductive material, such asiron (Fe), cobalt-iron (CoFe), cobalt-nickel-iron (CoNiFe), nickel-iron(NiFe), nickel (Ni), cobalt (Co), or other suitable magnetic andelectrically conductive material. At step 184, a non-constrictedjunction 186, shown in FIGS. 4 and 5, is formed between first and secondmagnetic leads 152 and 154. Junction 186 also includes a layer ofmagnetic and electrically conductive material 188 such as thosedescribed above.

In accordance with one embodiment of the invention, first and secondmagnetic leads 152 and 154 and junction 186 are formed of a single layerof magnetic and electrically conductive material 188, as shown in FIGS.4 and 5. Alternatively, first and second magnetic leads 152 and 154 andjunction 186 can be formed of different magnetic and electricallyconductive materials. If necessary, layer 188 can be formed on anon-metallic seed layer 190 and covered by a non-metallic cap layer 192,as shown in FIG. 5. First and second magnetic leads 152 and 154 andjunction 186 can also be substantially coplanar, as shown in FIG. 5.

Multiple sensor structures comprising first and second magnetic leads152 and 154 and junction 186 are preferably formed on a substrate 194,such as a semiconductor wafer. Junction 186 is formed much smaller thanfirst and second magnetic leads 152 and 154 and preferably has a width164 (FIG. 2) of at least 30 nm. That size constraint allows for multiplesensor structures to be formed on a wafer scale using conventionalphotolithographic methods. However, other methods can also be used toform the desired sensor structures, such as electron beam lithography(EBL), which generally has a resolution of 5 nm.

At step 196 of the method, the magnetic and electrical conductivity ofouter shell portion 166 of junction 186 is reduced to form constrictedjunction 160 comprising a magnetic and electrically conductive junctioncore 168 that is at least partially surrounded by shell portion 166.This step of the method is illustrated in FIGS. 6 and 7, which arecross-sectional views of the sensor structure of FIG. 5 taken generallyalong line 6-6 at subsequent processing stages. The reduction to themagnetic and electrical conductivity of layer 188 is accomplishedthrough the implantation of ions into junction 186, as illustrated byarrows 198 of FIG. 6. First and second magnetic leads 152 and 154 andother structures on substrate 194 can be protected from the ionimplantation process by appropriate masking. The implanted ions can beboron, phosphorous, gallium, chromium, arsenic or other material thatcan provide the desired conversion of shell portion 166 of magnetic andelectrically conductive layer 188 into a material having reducedmagnetic and electrical conductivity, as illustrated in FIG. 7. Forexample, if layer 188 was formed of nickel it would have an electricalresistivity of 7.0 micro-ohm-centimeter. Following the implantation of20% chromium ions into the nickel layer 188 increases the resistivity ofthe layer 188 to approximately 108 micro-ohm-centimeter. This is due tothe alloying effects, which increase electron scattering by adding animpurity into the pure metal.

The implantation of ions into junction 186 can be controlled such thatshell portion 166 is formed adjacent a single side 170 or 172 ofjunction core 168, even though it is shown as being formed around top200, side 170 and side 172 of junction core 168. The thickness of shellportion 166 can be accurately controlled by the duration of the ionimplantation process. As a result, width 164 of magnetic andelectrically conductive layer 188 as initially formed can be reduced toa desired width 174, as shown in FIGS. 2 and 7. As mentioned above,width 174 is less than 20 nm and is preferably less than approximately10 nm. Accordingly, when layer 188 of junction 186 has an initial width164 of 50 nm, for example, shell portion 166 reduces width 164 by atleast 30 nm.

The completion of the method of FIG. 3 results in the formation of amagnetoresistive sensor 150, such as that shown in FIGS. 2 and 7.Preferably, sensor 150 operates as a BMR sensor where junction core 168of constricted junction 160 has a width 174 that is less than an averageunrestricted domain wall width of the magnetic material forming junctioncore 168. The unrestricted domain wall width generally refers to thewidth of a domain wall of a large volume of the magnetic material. Thus,when junction core 168 is formed of the same magnetic material as thatwhich forms either first or second magnetic leads 152 or 154, width 174of junction core 168 is less than an average domain wall width of thefirst or second magnetic leads 152 or 154.

It is to be understood that even though numerous characteristics andadvantages of various embodiments of the invention have been set forthin the foregoing description, together with details of the structure andfunction of various embodiments of the invention, this disclosure isillustrative only, and changes may be made in detail, especially inmatters of structure and arrangement of parts within the principles ofthe present invention to the full extent indicated by the broad generalmeaning of the terms in which the appended claims are expressed. Forexample, the particular elements may vary depending on the particularapplication for the MR sensor while maintaining substantially the samefunctionality without departing from the scope and spirit of the presentinvention. In addition, although the preferred embodiment describedherein is directed to a MR sensor for a disc drive storage system, itwill be appreciated by those skilled in the art that the teachings ofthe present invention can be applied to magnetic field sensors andprobes and other devices without departing from the scope and spirit ofthe present invention.

1. A magnetoresistive sensor comprising: a first magnetic lead formed ofa magnetic and electrically conductive material; a second magnetic leadformed of a magnetic and electrically conductive material; and aconstricted junction joining the first and second magnetic leads, theconstricted junction including a junction core formed of magnetic andelectrically conductive material, and an ion implanted outer shellportion that at least partially surrounds the junction core and hasreduced magnetic and electrical conductivity relative to the junctioncore.
 2. The sensor of claim 1, wherein the first and second magneticleads and the junction core form an electrically conductive path havinga resistance that varies in response to an applied magnetic field. 3.The sensor of claim 1, wherein the first and second magnetic leadsrespectively include first and second magnetizations that are orientedin first and second directions, wherein the first direction is differentthan the second direction.
 4. The sensor of claim 1, wherein the firstmagnetic lead, the second magnetic lead, and the constricted junctionare substantially coplanar.
 5. The sensor of claim 1, including asensing current that is conducted through the junction core.
 6. Thesensor of claim 1, wherein the junction core includes a length that isdefined by a distance separating the first and second magnetic leads,and a width that is perpendicular to the length and is substantiallyless than an average unrestricted magnetic domain wall widthcorresponding to the magnetic material of the junction core.
 7. Thesensor of claim 6, wherein the width of the junction core isapproximately 20 nanometers or less.
 8. The sensor of claim 6, whereinthe width is defined by opposing side walls of the outer shell portionof the constricted junction.
 9. The sensor of claim 1, wherein the firstand second magnetic leads and the constricted junction are initiallyformed of a single layer of magnetic and electrically conductivematerial, and the outer shell portion is subsequently formed by ionimplantation of the constricted junction.
 10. The sensor of claim 9,wherein boron, phosphorous, gallium, chromium, or arsenic ions areimplanted in the outer shell portion of the constricted junction toreduce the magnetic and electrical conductivity of the outer shellportion relative to the junction core.
 11. A magnetoresistive sensorcomprising: a first magnetic lead formed of a magnetic and electricallyconductive material; a second magnetic lead formed of a magnetic andelectrically conductive material; and a constricted junction joining thefirst and second magnetic leads, the constricted junction including ajunction core formed of magnetic and electrically conductive materialwherein the junction core includes a length that is defined by adistance separating the first and second magnetic leads, and a widththat is perpendicular to the length and is substantially less than anaverage unrestricted magnetic domain wall width corresponding to themagnetic material of the junction core.
 12. The sensor of claim 11,wherein the constricted junction further comprises an ion implantedouter shell portion that at least partially surrounds the junction coreand has reduced magnetic and electrical conductivity relative to thejunction core.
 13. The sensor of claim 11, wherein the constrictedjunction is formed of a single layer of magnetic and electricallyconductive material that comprises the junction core and an ionimplanted outer shell portion having reduced magnetic and electricalconductivity relative to the junction core.
 14. The sensor of claim 11,wherein the width of the junction core is defined by an ion implantedouter shell portion having reduced magnetic and electrical conductivityrelative to the junction core.
 15. The sensor of claim 11, wherein thefirst and second magnetic leads respectively include first and secondmagnetizations that are oriented in first and second directions, whereinthe first direction is different than the second direction.
 16. Aconstricted junction of a magnetoresistive sensor that joins first andsecond magnetic leads of the sensor that are each formed of a magneticand electrically conductive material, the constricted junctioncomprising a junction core formed of magnetic and electricallyconductive material, and an ion implanted outer shell portion that atleast partially surrounds the junction core and has reduced magnetic andelectrical conductivity relative to the junction core.
 17. Theconstricted junction of claim 16, wherein the constricted junction issubstantially coplanar with the first and second magnetic leads.
 18. Theconstricted junction of claim 16, wherein the constricted junction andthe first and second magnetic leads are formed of a single layer ofmagnetic material prior to the formation of the outer shell portion. 19.The constricted junction of claim 16, wherein the junction core includesa length that is defined by a distance separating the first and secondmagnetic leads, and a width that is perpendicular to the length and issubstantially less than an average unrestricted magnetic domain wallwidth corresponding to the magnetic material of the junction core. 20.The constricted junction of claim 19, wherein the width of the junctioncore is defined by opposing side walls of the outer shell portion and isapproximately 20 nanometers or less.